Keyword:Semiconductor Manufacturing

Publications
Scheduling of Multi-Finger-Robotic Cluster Tools with Multi-Space Process Modules Lei Gu, Naiqi Wu, Yan Qiao and Siwei Zhang EasyChair Preprint 15315
An Efficient Integrated Scheduling Method for Twin-Cluster Tools with Buffer Space Configuration Yiming Lai, Chunrong Pan, Wenqing Xiong, Jinchao Fu, Yu Cui and Hao Zhou EasyChair Preprint 11230